Standard Practice for
Reporting Sputter Depth Profile Data in Secondary Ion Mass
Spectrometry (SIMS)1
This standard is issued under the fixed designation E 1162; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
Click below to download Astm E 1162 – 87 (Reapproved 2001) Pdf free
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Click here to Astm E 1161 – 03 Pdf free download